Focusing on semiconductors
Wuxi Hitron semiconductor Co.,Ltd. is a leading enterprise specializing in the research and development, manufacturing, and service of key components for semiconductor front-end manufacturing equipment. We specialize in the field of semiconductor core components and are committed to providing high-performance and high reliability products and technical support for the global semiconductor industry.
The company's core product line comprehensively covers key consumables and core components of front-end equipment, including but not limited to: perfluoroether rubber (FFKM) seals, precision door panels......
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The ESC Electrostatic Chuck is a core wafer clamping device in the field of semiconductor manufacturing, with electrostatic adsorption as its fundamental principle. It forms an electrostatic field by ...
As a new type of precision clamping technology replacing traditional mechanical clamping and vacuum adsorption, ESC Electrostatic Chucks have been applied on a large scale in various high-end manufact...
The core of an ESC Electrostatic Chuck is to achieve non-contact and precise fixation of thin workpieces such as wafers and glass substrates by virtue of electrostatic induction and electric field for...
The core factors influencing the adsorption force of ESC Electrostatic Chucks can be categorized into four types: material characteristics, structural parameters, operating parameters and working envi...
To enhance the stability and safety of ESC Electrostatic Chucks, a full-process guarantee system must be established from four dimensions: operation control, daily maintenance, structural optimization...