The slit valve doors act as barriers between different chambers within semiconductor fabrication equipment, controlling contamination and ensuring seamless wafer transfer.
What is a Slit Valve Door?
A slit valve door is a precision-engineered component used primarily in semiconductor manufacturing tools. It functions as a partition valve between chambers such as the load lock, transfer, and process chambers. The valve door opens and closes to allow wafers to pass through while maintaining vacuum integrity and preventing contamination.
Key functions include:
Creating a hermetic seal between process environments.
Minimizing particle generation (particulation).
Enabling quick and reliable wafer transfer.
Withstanding aggressive chemical and plasma environments.
