What Are The Application Scenarios Of DuPont Kalrez O-rings?
2026-01-23
DuPont Kalrez O-rings are suitable for harsh working conditions across various industries by virtue of their chemical corrosion resistance, wide temperature range adaptability and low contamination characteristics. They play a pivotal role especially in key processes requiring long-term stable sealing and avoidance of contamination and leakage risks. Their specific application scenarios are as follows: 1. Semiconductor Manufacturing As a core sealing component for semiconductor processes, Kalrez O-rings are adaptable to various plasma processes and vacuum environments, covering all key links in the entire chip manufacturing process. In deposition processes, for scenarios such as High-Density Plasma Chemical Vapor Deposition (HDPCVD), Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Atomic Layer Deposition (ALD), they can withstand process gases including TMS, TEOS, NF₃ and O₂ as well as high-temperature environments (250℃ to 310℃). Certain grades such as Kalrez® 9600 feature low erosion and low weight loss, meeting the requirements of high-purity vacuum applications, reducing particle generation and outgassing, and ensuring wafer processing quality. In etching and ashing processes—whether conductor etching (150℃ to 225℃, in contact with media such as CF₄ and HBr), dielectric etching...
What Is The Chemical Corrosion Resistance Of Kalrez O-rings?
2026-01-23
Wide range of chemical resistance Kalrez O-rings can resist more than 1,800 types of chemicals, including strong acids (e.g., concentrated nitric acid), strong alkalis (e.g., sodium hydroxide), organic solvents (e.g., toluene, acetone, dichloromethane), ethers, ketones, esters, benzene ring solvents, strong oxidants, amine compounds, fuels, oils and greases, etc. Its perfluoro main chain structure has no active reaction sites, fundamentally eliminating the possibility of corrosion failure. Verification of chemical corrosion resistance Swelling test: After 6 months of immersion in a mixed solution of toluene, acetone and dichloromethane, Kalrez O-rings show almost no volume change, while other rubbers undergo severe deformation. Comparative test: When Kalrez and fluororubber are immersed in organic media such as acetone and toluene, fluororubber swells significantly after 16 minutes, whereas Kalrez remains stable. Advantages in chemical corrosion resistance Far superior corrosion resistance to ordinary rubbers: Kalrez can maintain its sealing performance even in extreme chemical environments, while ordinary rubbers may suffer from volume expansion and sealing failure due to molecular chain breakage or cross-linked structure damage. Better corrosion resistance than other perfluoroelastomers: K...
Slit Valve Door - Structural Principle And Core Characteristics
2026-01-23
The slit valve door is a special component for cavity isolation and on-off control in vacuum systems. Named for its adaptation to the rectangular "transfer slit" opening between the transfer cavity and the process cavity, it falls into the category of gate-driven isolation valves. With its compact structure and reliable sealing performance, it has become a key component of vacuum systems in high-end manufacturing and scientific research fields. Its core design is developed around the sealing and isolation requirements of vacuum environments, taking into account opening-closing response and cleanliness control, and is suitable for a variety of harsh working conditions. In terms of working principle, the slit valve door realizes the on-off of the flow path through the linear movement of the gate plate, forming an isolation barrier between cavities. In the closed state, the gate plate is closely attached to the valve seat, and the gas flow is blocked by structural pressure and the characteristics of sealing parts to maintain the vacuum state inside the cavity. In the open state, the gate plate rises and falls vertically to the top of the valve cavity, making the flow path fully unobstructed and providing a channel for the transfer of workpieces such as wafers and substrates or gas circulatio...
