Product
Product

Slit Valve Actuator VAT201727 07512-UE24

    Process: ETCH
    Use for: PRODUCER LOAD LOCK


VAT 201727 Series Slit Valve is a high-performance product with UE24 specification. This Slit Valve Door uses VAT's patented sealing technology to provide industry-leading leak rate control. Suitable for advanced process equipment with extremely high vacuum requirements.