Product
Product

Parallel Seal Slit Valve

    Process: Shared
    Use for: Pendulum valve


The design of a high-performance slit valve requires careful consideration of:

  1. Flatness of the sealing surface to ensure zero-leak sealing
  2. Material selection for the operating environment (corrosion, plasma resistance)
  3. Mechanical rigidity to maintain dimensional stability under vacuum
  4. Proper sealing groove design to accommodate the O-ring

At Hitron, our engineering team has decades of combined experience in precision component manufacturing for semiconductor equipment, ensuring every slit valve meets the strictest industry standards.