Materials Used in Electrostatic Chucks
The choice of materials directly impacts ESC performance, durability, and compatibility with process environments.
Ceramics: High-insulation ceramics such as aluminum oxide (Al₂O₃), aluminum nitride (AlN), and silicon nitride (Si₃N₄) are commonly used for their excellent thermal conductivity, corrosion resistance, and electrical insulation.
Electrodes: Bulk metal electrodes embedded within ceramics provide stable electrostatic fields and may also serve as radio-frequency (RF) electrodes in plasma processes.
Surface Coatings: Special surface treatments reduce particle shedding and enhance cleanliness, critical for semiconductor fabrication.
