Product
Product

12" 300mm Esc Electrostatic Chuck

    Brand: Hitachi
    Type: ESC
    Specifications: Hitachi 8/12-inch ESC
    Warranty: Three months after shipment


AMAT 824398 Electrostatic Chuck features optimized electrode structure design, significantly improving adsorption efficiency. This product achieves more uniform electric field distribution through optimized electrode layout, providing stronger adsorption with minimal wafer damage. Widely used in various process chambers of semiconductor manufacturing, it is the preferred component for equipment upgrades.