AMAT 59798 Electrostatic Chuck features strong versatility and wide compatibility for electrostatic adsorption products. This ESC can be applied to multiple AMAT semiconductor equipment platforms including foundry and memory production lines. Unique electrode design ensures uniform adsorption force distribution, effectively preventing wafer deformation and slippage. Supports 8-inch and 12-inch wafer processing, providing cost-effective solutions for semiconductor manufacturing enterprises.
